Evidence map›Paper›PMID 38133007›Full record

ArticleNanomaterials (Basel, Switzerland)2023

Novel Energetic Co-Reactant for Thermal Oxide Atomic Layer Deposition: The Impact of Plasma-Activated Water on Al

João Chaves, William Chiappim, Júlia Karnopp, Benedito Neto, Douglas Leite, Argemiro da Silva Sobrinho, Rodrigo Pessoa

Abstract read
In one paragraph

Article in Nanomaterials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

João ChavesLaboratório de Plasmas e Processos, Departamento de Física, Instituto Tecnológico de Aeronáutica, Praça Marechal Eduardo Gomes 50, São José dos Campos 12228-900, Brazil.
William ChiappimLaboratório de Plasmas e Aplicações, Departamento de Física, Faculdade de Engenharia de Guaratinguetá, São Paulo State University (UNESP), Guaratinguetá 12516-410, Brazil.ORCID 0000-0003-2615-2216
Júlia KarnoppLaboratório de Plasmas e Processos, Departamento de Física, Instituto Tecnológico de Aeronáutica, Praça Marechal Eduardo Gomes 50, São José dos Campos 12228-900, Brazil.ORCID 0000-0002-8694-7697
Benedito NetoLaboratório de Plasmas e Processos, Departamento de Física, Instituto Tecnológico de Aeronáutica, Praça Marechal Eduardo Gomes 50, São José dos Campos 12228-900, Brazil.ORCID 0000-0002-1498-988X
Douglas LeiteLaboratório de Plasmas e Processos, Departamento de Física, Instituto Tecnológico de Aeronáutica, Praça Marechal Eduardo Gomes 50, São José dos Campos 12228-900, Brazil.ORCID 0000-0002-1792-6171
Argemiro da Silva SobrinhoLaboratório de Plasmas e Processos, Departamento de Física, Instituto Tecnológico de Aeronáutica, Praça Marechal Eduardo Gomes 50, São José dos Campos 12228-900, Brazil.ORCID 0000-0001-7227-9176
Rodrigo PessoaLaboratório de Plasmas e Processos, Departamento de Física, Instituto Tecnológico de Aeronáutica, Praça Marechal Eduardo Gomes 50, São José dos Campos 12228-900, Brazil.ORCID 0000-0001-7600-9747

Funding

São Paulo Research Foundation 2018/01265-1São Paulo Research Foundation 2019/05856-7
6 · The paper itself

Abstract

In the presented study, a novel approach for thermal atomic layer deposition (ALD) of Al

Indexed as

aluminaatomic layer depositiongrowth per cycleplasma-activated water

Identifiers

PMID38133007
PMCPMC10745439

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.