ArticleMicrosystems & nanoengineering2023
A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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4 citing papers in PubMed, 11 citations in OpenAlex.
- A novel multi-degree-of-freedom cascaded hybrid electro-mechanical resonator system with ultra-high sensitivity.Microsystems & nanoengineering · 2025Article
- Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators.Microsystems & nanoengineering · 2025Article
- A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control.Micromachines · 2025Article
- Localized topological states beyond Fano resonances via counter-propagating wave mode conversion in piezoelectric microelectromechanical devices.Nature communications · 2024Article
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Authors and funding
9 authors at 3 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
The development of mode-localized sensors based on amplitude output metrics has attracted increasing attention in recent years due to the potential of such sensors for high sensitivity and resolution. Mode-localization phenomena leverage the interaction between multiple coupled resonant modes to achieve enhanced performance, providing a promising solution to overcome the limitations of traditional sensing technologies. Amplitude noise plays a key role in determining the resolution of mode-localized sensors, as the output metric is derived from the measured AR (amplitude ratio) within the weakly coupled resonator system. However, the amplitude noise originating from the weakly coupled resonator's closed-loop circuit has not yet been fully investigated. This paper presents a decouple-decomposition (DD) noise analysis model, which is applied to achieve high resolution in a mode-localized tilt sensor based on a weakly coupled resonator closed-loop circuit. The DD noise model separates the weakly coupled resonators using the decoupling method considering the nonlinearity of the resonators. By integrating the decoupled weakly coupled resonators, the model decomposes the weakly coupled resonator's closed-loop circuit into distinct paths for amplitude and phase noise analyses. The DD noise model reveals noise effects at various circuit nodes and models the system noise in the closed-loop circuit of the weakly coupled resonators. MATLAB/Simulink simulations verify the model's accuracy when compared to theoretical analysis. At the optimal operating point, the mode-localized tilt sensor achieves an input-referred instability of 3.91 × 10
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