ReviewMicrosystems & nanoengineering2023
Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging.
Review in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 34 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
34 citing papers in PubMed.
- A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.Micromachines · 2026Article
- Comparability of Archived Aging-Stage and Retest Records from Miniature Temperature-Pressure Sensors: Rank, Concordance, and Response Shape.Sensors (Basel, Switzerland) · 2026Article
- Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations.Micromachines · 2026Article
- A Composite Layered Piezoelectric Pressure Sensor for Dynamic Monitoring with Enhanced Sensitivity and Temperature Adaptability.Sensors (Basel, Switzerland) · 2026Article
- High-Precision MEMS Resonant Pressure Sensor for Real-Time Barometric Monitoring.Micromachines · 2026Article
- Artificially Designed 2D Composite Material With Tailored Thermal Expansion Toward Temperature-Stable and Accurate Nanomechanical Pressure Sensors.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Leveraging the microscale effect to enhance the overload capacity of a piezoresistive differential pressure sensor.Microsystems & nanoengineering · 2026Article
- Methodology for Static Pressure Measurement Under Confined Spatial Conditions in the Low-Pressure Range.Sensors (Basel, Switzerland) · 2026Article
- Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids.Microsystems & nanoengineering · 2026Article
- Smart Catheters for Diagnosis, Monitoring, and Therapy.Advanced healthcare materials · 2026Review
- SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications.Sensors (Basel, Switzerland) · 2026Article
- Ultrasensitive soft vibration sensors based on atomically thin metal dichalcogenide ribbon networks.Science advances · 2026Article
- A cost-effective laboratory device for single slow micro compression testing of soft materials in the small-strain region.HardwareX · 2026Article
- Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition.Micromachines · 2026Article
- Investigation of III-Nitride MEMS Pressure Sensor for High-Temperature Applications.Micromachines · 2026Article
- Dispersive coupling and dual-mode sensing of a micromechanical resonator.Microsystems & nanoengineering · 2026Article
- Enhanced sensitivity in nonlinear parity-time symmetric silicon micromechanical resonators.Microsystems & nanoengineering · 2026Article
- Bifurcation-based wide-range vacuum pressure micro-sensor.Scientific reports · 2025Article
- Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors.Micromachines · 2025Article
- Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications.ACS omega · 2025Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
17 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, higher accuracy, better multifunctionality, smaller chip size, and smaller package size, have recently emerged. The demand for performance upgradation has led to breakthroughs in sensor materials, design, fabrication, and packaging methods, which have emerged frequently in recent decades. This paper reviews common new trends in MEMS pressure sensors, including minute differential pressure sensors (MDPSs), resonant pressure sensors (RPSs), integrated pressure sensors, miniaturized pressure chips, and leadless pressure sensors. To realize an extremely sensitive MDPS with broad application potential, including in medical ventilators and fire residual pressure monitors, the "beam-membrane-island" sensor design exhibits the best performance of 66 μV/V/kPa with a natural frequency of 11.3 kHz. In high-accuracy applications, silicon and quartz RPS are analyzed, and both materials show ±0.01%FS accuracy with respect to varying temperature coefficient of frequency (
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.