ArticleFrontiers in bioengineering and biotechnology2023
A highly sensitive flexible capacitive pressure sensor with hierarchical pyramid micro-structured PDMS-based dielectric layer for health monitoring.
Article in Frontiers in bioengineering and biotechnology, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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3 citing papers in PubMed.
- Overcoming high-temperature performance limitations: Multidimensional design and innovation of thin-film thermocouples.iScience · 2026Review
- Deep Learning-Based Prediction and Compensation of Performance Degradation in Flexible Sensors.Micromachines · 2026Article
- Self-Powered Biomimetic Pressure Sensor Based on Mn-Ag Electrochemical Reaction for Monitoring Rehabilitation Training of Athletes.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
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Authors and funding
10 authors.
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Abstract
Herein, a flexible pressure sensor with high sensitivity was created using a dielectric layer featuring a hierarchical pyramid microstructure, both in simulation and fabrication. The capacitive pressure sensor comprises a hierarchically arranged dielectric layer made of polydimethylsiloxane (PDMS) with pyramid microstructures, positioned between copper electrodes at the top and bottom. The achievement of superior sensing performance is highly contingent upon the thickness of the dielectric layer, as indicated by both empirical findings and finite-element analysis. Specifically, the capacitive pressure sensor, featuring a dielectric layer thickness of 0.5 mm, exhibits a remarkable sensitivity of 0.77 kPa
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