ArticleMicromachines2023
Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
4 citing papers in PubMed.
- CMOS-MEMS Z-Axis Magnetic Field Sensor with an Additional Collector.Micromachines · 2026Article
- Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition.Micromachines · 2026Article
- CMOS-Compatible Micro Photovoltaic Generator with Post-Processing Enhanced Optical Absorption.Micromachines · 2025Article
- Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition.Micromachines · 2025Article
Corrections and comments
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Authors and funding
2 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This study develops a photovoltaic microgenerator based on the complementary metal oxide semiconductor (CMOS) process. The photovoltaic microgenerator converts the absorbed light energy into electrical energy using the photovoltaic effect. The material for the photovoltaic microgenerator is silicon, and its structure consists of patterned p-n junctions. The design of the photovoltaic microgenerator utilizes a grid-like shape, forming a large-area p-n junction with a patterned p-doping and N-well structure to enhance the photocurrent and improve the device's performance. The photovoltaic microgenerator is fabricated employing the CMOS process with post-processing step. Post-processing is applied to enhance the microgenerator's light absorption and energy-conversion efficiency. This involves using wet etching with buffered-oxide etch (BOE) to remove the silicon dioxide layer above the p-n junctions, allowing direct illumination of the p-n junctions. The area of the photovoltaic microgenerator is 0.79 mm
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Registered trials
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