Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films.

Georgii A Pleshakov, Ivan A Kalinin, Alexey V Ivanov, Ilya V Roslyakov, Igor V Yaminsky, Kirill S Napolskii

Open access · goldAbstract read

In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

0.1field-weighted citation impact, top 58% of its field

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed, 1 citations in OpenAlex.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors at 2 institutions in 1 country.

Georgii A PleshakovDepartment of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.ORCID 0009-0004-1285-3665

Ivan A KalininDepartment of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.ORCID 0000-0002-4515-0083

Alexey V IvanovDepartment of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.ORCID 0000-0002-2946-7195

Ilya V RoslyakovDepartment of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.

Igor V YaminskyDepartment of Physics, Lomonosov Moscow State University, 1, Bld. 2 Leninskie Gory, Moscow 119991, Russia.ORCID 0000-0001-8731-3947

Kirill S NapolskiiDepartment of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.ORCID 0000-0002-9353-9114

Lomonosov Moscow State University · RUSkolkovo Institute of Science and Technology · RU

Funding

The Ministry of Education and Science of the Russian Federation 075-15-2021-1353

6 · The paper itself

Abstract

Platinum-based thin films are widely used to create microelectronic devices operating at temperatures above 500 °C. One of the most effective ways to increase the high-temperature stability of platinum-based films involves incorporating refractory metal oxides (e.g., ZrO

Indexed as

anodic aluminium oxidehigh-temperature stabilitymagnetron sputteringplatinum–rhodium alloyrecrystallization suppressionthin filmtwo-step annealingzirconium dioxide

Identifiers

PMID38004860

DOI10.3390/mi14112003

PMCPMC10673003

OpenAlexW4388021043

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.