Evidence map›Paper›PMID 37960619›Full record

ArticleSensors (Basel, Switzerland)2023

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation.

Raju Patel, Manoj Singh Adhikari, Shailendra Kumar Tripathi, Sourabh Sahu

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Raju PatelSchool of Electronics Engineering (SENSE), Vellore Institute of Technology (VIT), Chennai 600127, India.ORCID 0000-0002-4129-8793
Manoj Singh AdhikariSchool of Electronics & Electrical Engineering, Lovely Professional University, Phagwara 144411, India.ORCID 0000-0001-7645-658X
Shailendra Kumar TripathiDepartment of Electronics & Communication Engineering, KL University, Guntur 522502, India.
Sourabh SahuDepartment of Electronics & Communication Engineering, Gyan Ganga Institute of Technology and Sciences, Jabalpur 482003, India.ORCID 0000-0001-6158-3287

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural and surface morphologies of the deposited ZnO as a piezoelectric layer have been studied using XRD and AFM. The XRD pattern of deposited bulk ZnO film indicates the perfect single crystalline nature of the film with dominant phase (002) at 2θ = 34.58°. The AFM micrograph indicates that deposited piezoelectric film has a very smooth surface and small grain size. In the fabrication process, use of bulk micro machined oxide (SiO

Indexed as

MEMSsingle port acoustic resonatorstructural morphologiesvector network analyzerzinc oxide

Identifiers

PMID37960619
PMCPMC10648268

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.