Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator.

Mohammed Awad, Temesgen Bailie Workie, Jingfu Bao, Ken-Ya Hashimoto

Abstract read

In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Quality Factor Improvement of a Thin-Film Piezoelectric-on-Silicon Resonator Using a Radial Alternating Material Phononic Crystal.Micromachines · 2023
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Mohammed AwadSchool of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0009-0000-6552-1008

Temesgen Bailie WorkieSchool of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0000-0003-2093-5877

Jingfu BaoSchool of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0000-0002-8752-5234

Ken-Ya HashimotoSchool of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Funding

National Natural Science Foundation of China U1430102

6 · The paper itself

Abstract

This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.

Indexed as

anchor lossMEMSquality factortetherTPoS

Identifiers

PMID37893402

DOI10.3390/mi14101965

PMCPMC10608936

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.