ArticleMicromachines2023
Research on Packaging Reliability and Quality Factor Degradation Model for Wafer-Level Vacuum Sealing MEMS Gyroscopes.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
5 citing papers in PubMed.
- Frequency Stability Degradation in Quartz and MEMS Oscillators.Sensors (Basel, Switzerland) · 2026Review
- Reliability Assessment of MEMS Gyroscopes via Dual-Mechanism Synergistic Degradation: A Generalized Linear Model with Physics-Informed Wiener Processes.Sensors (Basel, Switzerland) · 2026Article
- Porous Au/Ti Bilayer Thin-Film Getters Based on Black Silicon for MEMS Vacuum Packaging.Micromachines · 2026Article
- Fractional-Order Identification of Gyroscope MEMS Noise Under Helium Exposure.Sensors (Basel, Switzerland) · 2025Article
- Ceramics for Microelectromechanical Systems Applications: A Review.Micromachines · 2024Review
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
MEMS gyroscopes are widely applied in consumer electronics, aerospace, missile guidance, and other fields. Reliable packaging is the foundation for ensuring the survivability and performance of the sensor in harsh environments, but gas leakage models of wafer-level MEMS gyroscopes are rarely reported. This paper proposes a gas leakage model for evaluating the packaging reliability of wafer-level MEMS gyroscopes. Based on thermodynamics and hydromechanics, the relationships between the quality factor, gas molecule number, and a quality factor degradation model are derived. The mechanism of the effect of gas leakage on the quality factor is explored at wafer-level packaging. The experimental results show that the reciprocal of the quality factor is exponentially related to gas leakage time, which is in accordance with the theoretical analysis. The coefficients of determination (
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.