ArticleMicromachines2023
The High-Efficiency Design Method for Capacitive MEMS Accelerometer.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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2 citing papers in PubMed.
- A Variable Reduction Approach for Microbeams on Elastic Foundation.Sensors (Basel, Switzerland) · 2025Article
- Neural Network Methods in the Development of MEMS Sensors.Micromachines · 2024Review
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Authors and funding
7 authors.
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Abstract
In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design method, an orthogonal design and the particle swarm optimization (PSO) algorithm are introduced to improve the design efficiency. The whole process includes a finite element method (FEM) simulation, high-efficiency design, and verification. Through the theoretical analysis, the working mechanism of capacitive MEMS accelerometer is clear. Based on the comparison among the sweep calculation results of these parameters in the FEM software, four representative structural parameters are selected for further study, and they are
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