Alternative Approach to Design and Optimization of High-Q Ring Resonators for Membrane-Free Acoustic Sensors.

Yongqiu Zheng, Jiamin Chen, Yuan Han, Jiandong Bai, Yifan Luo, Yonghua Wang, Chenyang Xue

Abstract read

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Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

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1 citing paper in PubMed.

Topic Editorial on Photonic and Optoelectronic Devices and Systems.Micromachines · 2024
Article

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Authors and funding

7 authors.

Yongqiu ZhengState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Jiamin ChenState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Yuan HanState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Jiandong BaiState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.ORCID 0000-0001-8760-8171

Yifan LuoState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Yonghua WangState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Chenyang XueState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Funding

Fundamental Research Program of Shanxi Province 202103021222012, 202103021223202National Natural Science Foundation of China 62131018, 62205308, 62005251Shanxi "1331 Project" Key Subject Construction (1331KSC) (1331KSC)

6 · The paper itself

Abstract

Membrane-free acoustic sensors based on new principle and structure are becoming a research hotspot, because of many advantages, e.g., their wide bandwidth and high sensitivity. It is proposed that a membrane-free acoustic sensor employs a semi-buried optical waveguide ring resonator (SOWRR) as a sensing element. Using air as the upper cladding medium, the excited evanescent field in the air cladding medium would be modulated by acoustic wave. On this basis, the acoustic sensing model is established. Taking high Q factor and resonance depth as design criteria, the optimal design parameters are given. The optimal values of the air/SiO

Indexed as

acoustic sensorhigh sensitivitymembrane-freeoptical waveguide ring resonatorwide-frequency response

Identifiers

PMID37893313

DOI10.3390/mi14101876

PMCPMC10609190

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