ArticleACS photonics2023
High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature.
Article in ACS photonics, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- Spin-photon qubits for scalable quantum network.Light, science & applications · 2026Review
- Amorphous silicon-carbide photonics for ultrasound imaging.Communications physics · 2026Article
- Silicon Carbide Neural Interfaces: A Review of Progress Toward Monolithic Devices.Nanomaterials (Basel, Switzerland) · 2025Review
- Advanced Mid-Infrared Sensors for Molecular Analysis.Analytical chemistry · 2025Review
- Magic Silicon Dioxide for Widely Tunable Photonic Integrated Circuits.ACS photonics · 2025Article
- Thin Hydrogenated Amorphous Silicon Carbide Layers with Embedded Ge Nanocrystals.Nanomaterials (Basel, Switzerland) · 2025Article
- Amorphous SiC Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition for Passivation in Biomedical Devices.Materials (Basel, Switzerland) · 2024Review
Corrections and comments
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Authors and funding
12 authors.
Funding
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Abstract
Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated platform. Silicon carbide is a material of great interest because of its high refractive index, strong second- and third-order nonlinearities, and broad transparency window in the visible and near-infrared range. However, integrating silicon carbide (SiC) has been difficult, and current approaches rely on transfer bonding techniques that are time-consuming, expensive, and lacking precision in layer thickness. Here, we demonstrate high-index amorphous silicon carbide (a-SiC) films deposited at 150 °C and verify the high performance of the platform by fabricating standard photonic waveguides and ring resonators. The intrinsic quality factors of single-mode ring resonators were in the range of
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Registered trials
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