Evidence map›Paper›PMID 37865645›Full record

ArticleNature communications2023

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions.

Maxim R Shcherbakov, Giovanni Sartorello, Simin Zhang, Joshua Bocanegra, Melissa Bosch, Michael Tripepi, Noah Talisa, Abdallah AlShafey, Joseph Smith, Stephen Londo and 3 more

Abstract read
In one paragraph

Article in Nature communications, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Giant photorefractive and photoexpansion effects in a van der Waals semiconductor.Proceedings of the National Academy of Sciences of the United States of America · 2026
    Article
  2. Nonlinear mid-infrared meta-membranes.Nanophotonics (Berlin, Germany) · 2024
    Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

13 authors.

Maxim R ShcherbakovDepartment of Electrical Engineering and Computer Science, University of California, Irvine, CA, 92697, USA. maxim.shcherbakov@uci.edu.ORCID http://orcid.org/0000-0001-7198-5482
Giovanni SartorelloSchool of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14850, USA.ORCID http://orcid.org/0000-0002-8921-1458
Simin ZhangDepartment of Material Science and Engineering, The Ohio State University, Columbus, OH, 43210, USA.ORCID http://orcid.org/0000-0001-7494-8230
Joshua BocanegraDepartment of Electrical Engineering and Computer Science, University of California, Irvine, CA, 92697, USA.ORCID http://orcid.org/0000-0002-3300-2833
Melissa BoschSchool of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14850, USA.
Michael TripepiPhysics Department, Hillsdale College, Hillsdale, MI, 49242, USA.ORCID http://orcid.org/0000-0002-4657-9826
Noah TalisaDepartment of Physics, The Ohio State University, Columbus, OH, 43210, USA.
Abdallah AlShafeyDepartment of Physics, The Ohio State University, Columbus, OH, 43210, USA.
Joseph SmithPhysics Department, Marietta College, Marietta, OH, 45750, USA.ORCID http://orcid.org/0000-0002-5978-6840
Stephen LondoAdvanced Laser Light Source (ALLS) at Centre Énergie Matériaux Télécommunications, Institut national de la recherche scientifique, Varennes, Québec, J3X 1P7, Canada.
François LégaréAdvanced Laser Light Source (ALLS) at Centre Énergie Matériaux Télécommunications, Institut national de la recherche scientifique, Varennes, Québec, J3X 1P7, Canada.
Enam ChowdhuryDepartment of Material Science and Engineering, The Ohio State University, Columbus, OH, 43210, USA.
Gennady ShvetsSchool of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14850, USA.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Femtosecond-laser-assisted material restructuring employs extreme optical intensities to localize the ablation regions. To overcome the minimum feature size limit set by the wave nature of photons, there is a need for new approaches to tailored material processing at the nanoscale. Here, we report the formation of deeply-subwavelength features in silicon, enabled by localized laser-induced phase explosions in prefabricated silicon resonators. Using short trains of mid-infrared laser pulses, we demonstrate the controllable formation of high aspect ratio (>10:1) nanotrenches as narrow as [Formula: see text]. The trench geometry is shown to be scalable with wavelength, and controlled by multiple parameters of the laser pulse train, such as the intensity and polarization of each laser pulse and their total number. Particle-in-cell simulations reveal localized heating of silicon beyond its boiling point and suggest its subsequent phase explosion on the nanoscale commensurate with the experimental data. The observed femtosecond-laser assisted nanostructuring of engineered microstructures (FLANEM) expands the nanofabrication toolbox and opens exciting opportunities for high-throughput optical methods of nanoscale structuring of solid materials.

Identifiers

PMID37865645
PMCPMC10590427

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.