ArticleNature communications2023
CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor.
Article in Nature communications, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
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Who cites it
14 citing papers in PubMed, 66 citations in OpenAlex.
- Van der Waals epitaxy suppresses thermal rupture in ultrathin metals.Nature communications · 2026Article
- High-Mobility and Reliability Ultra-Thin-Channel Oxide Semiconductor Field-Effect Transistors for Chip-Interconnect-Embedded Logic and Ferroelectric Memory.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- 2D Materials Powering Neuromorphic Intelligence.Nano-micro letters · 2026Review
- Selected Deposition Techniques and the Effect of Doping on the Properties of Thin ZnO Films: A Literature Review.Materials (Basel, Switzerland) · 2026Review
- Oxide Semiconductor Thin-Film Transistors for Low-Power Electronics.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Review
- Piezoelectric surface acoustic wave memristor neural network.Science advances · 2026Article
- Dynamically Tunable Pseudo-Enhancement-Load Inverters Based on High-Performance InAlZnO Thin-Film Transistors.Nanomaterials (Basel, Switzerland) · 2026Article
- Remarkably High Effective Mobility of 301 cmNanomaterials (Basel, Switzerland) · 2026Article
- Beyond the Silicon Plateau: A Convergence of Novel Materials for Transistor Evolution.Nano-micro letters · 2025Review
- ALD-Grown ZnO TFTs Patterned by High-Resolution Reverse-Offset Printing.ACS applied materials & interfaces · 2025Article
- Van der Waals Engineering of One-Transistor-One-Ferroelectric-Memristor Architecture for an Energy-Efficient Neuromorphic Array.Nano letters · 2025Article
- Direct Observation of Photoexcited Localized Energy States of Atomically Deposited ZnO Transistors by Analyzing Transfer Characteristics.ACS omega · 2025Article
- Fully integrated multi-mode optoelectronic memristor array for diversified in-sensor computing.Nature nanotechnology · 2025Article
- Non-Volatile Memory Based on ZnO Thin-Film Transistor with Self-Assembled Au Nanocrystals.Nanomaterials (Basel, Switzerland) · 2024Article
Corrections and comments
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Authors and funding
13 authors at 4 institutions in 2 countries.
Funding
Abstract
The development of high-performance oxide-based transistors is critical to enable very large-scale integration (VLSI) of monolithic 3-D integrated circuit (IC) in complementary metal oxide semiconductor (CMOS) backend-of-line (BEOL). Atomic layer deposition (ALD) deposited ZnO is an attractive candidate due to its excellent electrical properties, low processing temperature below copper interconnect thermal budget, and conformal sidewall deposition for novel 3D architecture. An optimized ALD deposited ZnO thin-film transistor achieving a record field-effect and intrinsic mobility (µ
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.