ArticleACS photonics2023
C- and O-Band Dual-Polarization Fiber-to-Chip Grating Couplers for Silicon Nitride Photonics.
Article in ACS photonics, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- High-efficiency grating couplers for vertical coupling in thin-film silicon nitride technology.Scientific reports · 2026Article
- The plasmonic BTO-on-SiN platform - beyond 200 GBd modulation for optical communications.Light, science & applications · 2025Article
- Subwavelength grating-assisted silicon nitride edge coupler with relaxed alignment tolerance.Scientific reports · 2025Article
- Ultrabroadband plug-and-play photonic tensor core packaging with sub-dB loss.Science advances · 2025Article
- Waveguide grating couplers with bandwidth beyond 200 nm.Nanophotonics (Berlin, Germany) · 2025Article
- High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay.Scientific reports · 2024Article
- High-Efficiency Metamaterial-Engineered Grating Couplers for Silicon Nitride Photonics.Nanomaterials (Basel, Switzerland) · 2024Article
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Authors and funding
12 authors.
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Abstract
Highly efficient coupling of light from an optical fiber to silicon nitride (SiN) photonic integrated circuits (PICs) is experimentally demonstrated with simple and fabrication-tolerant grating couplers (GC). Fully etched amorphous silicon gratings are formed on top of foundry-produced SiN PICs in a back-end-of-the-line (BEOL) process, which is compatible with 248 nm deep UV lithography. Metallic back reflectors are introduced to enhance the coupling efficiency (CE) from -1.11 to -0.44 dB in simulation and from -2.2 to -1.4 dB in experiments for the TE polarization in the C-band. Furthermore, these gratings can be optimized to couple both TE and TM polarizations with a CE below -3 dB and polarization-dependent losses under 1 dB over a wavelength range of 40 nm in the O-band. This elegant approach offers a simple solution for the realization of compact and, at the same time, highly efficient coupling schemes in SiN PICs.
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