Adaptive Fuzzy Modal Matching of Capacitive Micromachined Gyro Electrostatic Controlling.

Li Cheng, Ruimin Liu, Shumin Guo, Gaofeng Zheng, Yifang Liu

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In one paragraph

Article in Sensors (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

5 authors.

Li ChengDepartment of Aeronautical and Aviation Engineering, Hong Kong Polytechnic University, Hong Kong.

Ruimin LiuPen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China.

Shumin GuoSchool of Mathematical Sciences, Xiamen University, Xiamen 361002, China.

Gaofeng ZhengPen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China.ORCID 0000-0003-0870-6166

Yifang LiuPen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China.ORCID 0000-0003-3800-5512

Funding

Natural Science Foundation of Fujian Province 2020H6003Natural Science Foundation of Guangdong Province 2022A1515010923Natural Science Foundation of Guangdong Province 2022A1515010949

6 · The paper itself

Abstract

A fuzzy PI controller was utilized to realize the modal matching between a driving and detecting model. A simulation model was built to study electrostatic decoupling controlling technology. The simulation results show that the modal matching can be gained by the fuzzy PI controller. The frequency difference between the driving mode and the detection mode is less than 1 Hz, and the offset of the input DC is smaller than 0.6 V. The optimal proportionality factor and integral coefficient are 1.5 and 20, respectively. The fuzzy PI controlling technology provides a good way for the parameter optimization to gain modal matching of micro gyro, via which the detecting accuracy and stability can be improved greatly.

Indexed as

capacitive micro-machined gyroelectrostatic controlfeedback controlmodal matchingnumerical simulation

Identifiers

PMID37687879

DOI10.3390/s23177422

PMCPMC10490791

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.