ArticleNature communications2023
Stacking transfer of wafer-scale graphene-based van der Waals superlattices.
Article in Nature communications, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Highly Efficient Conductivity Modulation via Stacked Multi-Gate Graphene Ambipolar Transistors.Nanomaterials (Basel, Switzerland) · 2026Article
- Ripple-assisted adsorption of noble gases on graphene at room temperature.National science review · 2026Article
- Single atom Ru-supported reduced graphene oxide integrated self-assembled monolayer as a nm-scale Cu diffusion barrier.Nature communications · 2025Article
- Sensitive Sub-THz Photodetection in Twisted Graphene with Broad Spectral Response.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Commensurate, Incommensurate, and Reconstructed Structures of Multilayer Transition Metal Dichalcogenide and Their Applications.Small (Weinheim an der Bergstrasse, Germany) · 2025Review
- Applications of Carbon-Based Multivariable Chemical Sensors for Analyte Recognition.Nano-micro letters · 2025Review
- Realization of highly asymmetric hydrogenated graphene in the van der Waals confined space.National science review · 2025Article
- Graphene MEMS and NEMS.Microsystems & nanoengineering · 2024Review
Corrections and comments
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Authors and funding
13 authors.
Funding
Abstract
High-quality graphene-based van der Waals superlattices are crucial for investigating physical properties and developing functional devices. However, achieving homogeneous wafer-scale graphene-based superlattices with controlled twist angles is challenging. Here, we present a flat-to-flat transfer method for fabricating wafer-scale graphene and graphene-based superlattices. The aqueous solution between graphene and substrate is removed by a two-step spinning-assisted dehydration procedure with the optimal wetting angle. Proton-assisted treatment is further used to clean graphene surfaces and interfaces, which also decouples graphene and neutralizes the doping levels. Twist angles between different layers are accurately controlled by adjusting the macroscopic stacking angle through their wafer flats. Transferred films exhibit minimal defects, homogeneous morphology, and uniform electrical properties over wafer scale. Even at room temperature, robust quantum Hall effects are observed in graphene films with centimetre-scale linewidth. Our stacking transfer method can facilitate the fabrication of graphene-based van der Waals superlattices and accelerate functional device applications.
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Registered trials
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