ArticlePhotoacoustics2023
Silicon photonic acoustic detector (SPADE) using a silicon nitride microring resonator.
Article in Photoacoustics, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
8 citing papers in PubMed, 19 citations in OpenAlex.
- Article
- Ultra-sensitive wideband diffraction-grating-coupled-mode Fabry-Pérot resonators for ultrasound and photoacoustic detection.Photoacoustics · 2026Article
- Imprinted high-Opto-electronic advances · 2026Article
- Amorphous silicon-carbide photonics for ultrasound imaging.Communications physics · 2026Article
- Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides.Scientific reports · 2025Article
- Mini review of photoacoustic clinical imaging: a noninvasive tool for disease diagnosis and treatment evaluation.Journal of biomedical optics · 2024Review
- Deep tissue photoacoustic imaging with light and sound.Npj imaging · 2024Review
- Large-field-of-view optical-resolution optoacoustic microscopy using a stationary silicon-photonics acoustic detector.Journal of biomedical optics · 2024Article
Corrections and comments
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Authors and funding
8 authors at 1 institution in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Silicon photonics is an emerging platform for acoustic sensing, offering exceptional miniaturization and sensitivity. While efforts have focused on silicon-based resonators, silicon nitride resonators can potentially achieve higher Q-factors, further enhancing sensitivity. In this work, a 30 µm silicon nitride microring resonator was fabricated and coated with an elastomer to optimize acoustic sensitivity and signal fidelity. The resonator was characterized acoustically, and its capability for optoacoustic tomography was demonstrated. An acoustic bandwidth of 120 MHz and a noise-equivalent pressure of ∼ 7 mPa/Hz
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