ArticleNanomaterials (Basel, Switzerland)2023
Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics.
Article in Nanomaterials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
7 citing papers in PubMed, 27 citations in OpenAlex.
- Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.Nature communications · 2026Article
- Defect-Coating-Wavelength Coupling Effects on Nano-Scale Electric Field Modulation in Fused Silica Under Multi-Wavelength Irradiation.Nanomaterials (Basel, Switzerland) · 2025Article
- Deposition of uniform films on complex 3D objects by atomic layer deposition for plasma etch-resistant coatings.National science review · 2025Article
- Development of an innovative low-temperature PEALD process for stress-compensated TiODiscover nano · 2025Article
- Advanced fabrication techniques for polymer-metal nanocomposite films: state-of-the-art innovations in energy and electronic applications.Chemical science · 2025Review
- Two-Photon Polymerization of Nanocomposites for Additive Manufacturing of Transparent Magnesium Aluminate Spinel Ceramics.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Editorial of the Special Issue 'Nano-Optics and Nano-Optoelectronics: Challenges and Future Trends'.Nanomaterials (Basel, Switzerland) · 2024Article
Corrections and comments
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Authors and funding
6 authors at 2 institutions in 1 country.
Funding
Abstract
The increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the possibility of forming an anti-reflective coating on hybrid polymer micro-lenses fabricated by employing LDW without changing their geometry. Such coating deposited via atomic layer deposition (ALD) decreased the reflection from 3.3% to 0.1% at a wavelength of 633 nm for one surface of hybrid organic-inorganic SZ2080™ material. This research validates the compatibility of ALD with LDW 3D multiphoton lithography synergistically, expanding its applications on optical grade sub-100 μm scale micro-optics.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.