ArticleMicromachines2023
Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators.Micromachines · 2023Article
- Quality Factor Improvement of a Thin-Film Piezoelectric-on-Silicon Resonator Using a Radial Alternating Material Phononic Crystal.Micromachines · 2023Article
- Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator.Micromachines · 2023Article
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This paper proposes a reem-shaped phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate upon its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape phononic crystals generate a band gap up to 175 MHz with a BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and the unloaded quality factor from 133,000 to 160,000, representing 33.3-fold and 1.2-fold improvements, respectively.
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