Evidence map›Paper›PMID 37570187›Full record

ArticleMaterials (Basel, Switzerland)2023

Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration.

Weiye Huang, Junyi Wu, Wenxin Li, Guojin Chen, Changyong Chu, Chao Li, Yucheng Zhu, Hui Yang, Yan Chao

Open access · goldAbstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
0.5field-weighted citation impact, top 39% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 5 citations in OpenAlex.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors at 1 institution in 1 country.

Weiye HuangSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Junyi WuSanmen Sanyou Technology Inc., Taizhou 472000, China.
Wenxin LiSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Guojin ChenSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Changyong ChuSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.ORCID 0000-0003-1492-6464
Chao LiSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Yucheng ZhuSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Hui YangSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Yan ChaoSchool of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Hangzhou Dianzi University · CN

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

In this work, we design a micro-vibration platform, which combined with the traditional metal-assisted chemical etching (MaCE) to etch silicon nanowires (SiNWs). The etching mechanism of SiNWs, including in the mass-transport (MT) and charge-transport (CT) processes, was explored through the characterization of SiNW's length as a function of MaCE combined with micro-vibration conditions, such as vibration amplitude and frequency. The scanning electron microscope (SEM) experimental results indicated that the etching rate would be continuously improved with an increase in amplitude and reached its maximum at 4 μm. Further increasing amplitude reduced the etching rate and affected the morphology of the SiNWs. Adjusting the vibration frequency would result in a maximum etching rate at a frequency of 20 Hz, and increasing the frequency will not help to improve the etching effects.

Indexed as

amplitudeetching ratefrequencyMaCEmicro-vibration platform

Identifiers

PMID37570187
PMCPMC10420322
OpenAlexW4385603001

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.