ArticleScientific reports2023
Three-dimensional micro-X-ray topography using focused sheet-shaped X-ray beam.
Article in Scientific reports, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Oblique diffraction geometry for the observation of several non-coplanar Bragg reflections under identical illumination.Journal of applied crystallography · 2025Article
- Individual dislocation identification in dark-field X-ray microscopy.Journal of applied crystallography · 2025Article
- Application of laboratory micro X-ray fluorescence devices for X-ray topography.Journal of applied crystallography · 2024Article
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Authors and funding
9 authors.
Funding
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Abstract
X-ray topography is a powerful method for analyzing crystal defects and strain in crystalline materials non-destructively. However, conventional X-ray topography uses simple X-ray diffraction images, which means depth information on defects and dislocations cannot be obtained. We have therefor developed a novel three-dimensional micro-X-ray topography technique (3D μ-XRT) that combines Bragg-case section topography with focused sheet-shaped X-rays. The depth resolution of the 3D μ-XRT depends mainly on the focused X-ray beam size and enables non-destructive observation of internal defects and dislocations with an accuracy on the order of 1 μm. The demonstrative observation of SiC power device chips showed that stacking faults, threading screw, threading edge, and basal plane dislocations were clearly visualized three-dimensionally with a depth accuracy of 1.3 μm. 3D μ-XRT is a promising new approach for highly sensitive and non-destructive analysis of material crystallinity in a three-dimensional manner.
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Registered trials
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