ArticleScientific reports2023
Silicon-based mid infrared on-chip gas sensor using Fano resonance of coupled plasmonic microcavities.
Article in Scientific reports, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed, 24 citations in OpenAlex.
- Slow-Light Mid-IR Silicon Photonic Chips for NOACS omega · 2026Article
- Article
- Enhanced Sensitivity of Sub-THz Thermomechanical Bolometers Exploiting Vibrational Nonlinearity.ACS photonics · 2026Article
- Synergistic integration of plasmonic and perovskite nanosurfaces to create a multi-gas sensor for environmental monitoring.RSC advances · 2024Article
- Silicon-based double fano resonances photonic integrated gas sensor.Scientific reports · 2024Article
- Optical Sensing Using Hybrid Multilayer Grating Metasurfaces with Customized Spectral Response.Sensors (Basel, Switzerland) · 2024Article
- Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators.Sensors (Basel, Switzerland) · 2023Article
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Authors and funding
2 authors at 1 institution in 1 country.
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Abstract
Sensing in the mid infrared spectral range is highly desirable for the detection and monitoring of different gases. We hereby propose a CMOS compatible silicon-based sensor that operates at (3.5-10 μm) within the mid infrared range. The silicon material is doped to the level that shifts its plasmonic resonance to 3 μm wavelength. The sensor device comprises an in-line rectangular microcavity and a stub microcavity resonator. The resonance frequencies/wavelengths of the two resonators were studied with different design dimensions. When the two resonators are designed to resonate at close frequencies, the interesting Fano resonance with its distinct and sharp line shape is excited due to the interference between the two resonance profiles. Fano resonance is useful for highly sensitive measurements due to its abrupt intensity changing profile. The sensor is studied and analyzed using Finite Difference Element and 2D Finite Difference Time Domain methods. The sensor's performance is characterized by its high sensitivity of 6000 nm/RIU, FOM of 353, and limited insertion loss of 0.45 dB around 6.5 μm operation wavelength. Furthermore, we develop the sensor for simultaneously detecting formaldehyde CH
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