ReviewMicrosystems & nanoengineering2023
Thin-film PMUTs: a review of over 40 years of research.
Review in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 35 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
35 citing papers in PubMed.
- Advanced methods of wearable ultrasound and photoacoustic imaging devices: A review.Photoacoustics · 2026Article
- Theoretical modeling and optimization design of T-shape cavity CMUTs for enhanced acoustic performances and lowered bias voltage.Microsystems & nanoengineering · 2026Article
- Acoustic resonators as wireless actuators in air for small-scale robots.Science advances · 2026Article
- Ultra-sensitive wideband diffraction-grating-coupled-mode Fabry-Pérot resonators for ultrasound and photoacoustic detection.Photoacoustics · 2026Article
- A Comparative Analysis of Lead-Free Piezoelectric Micromachined Ultrasonic Transducers for Powered Bio-Sensing.Micromachines · 2026Article
- Flexible bioelectronic sensors promote the advancement of wearable ultrasound technology in the medicine.Microsystems & nanoengineering · 2026Review
- Recent advances in transducers for through-tissue ultrasonic power transfer.Progress in biomedical engineering (Bristol, England) · 2026Review
- Theoretical modelling and optimization design of PMUT arrays for enhanced acoustic performance.Microsystems & nanoengineering · 2026Article
- PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.Sensors (Basel, Switzerland) · 2026Article
- High-Precision Salt Concentration Detection Using a CMUT Array with Temperature Compensation.Micromachines · 2026Article
- Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter.Micromachines · 2026Article
- High frame rate ultrasonic flowmeter based on PMUT array with bidirectional acoustic beams.Microsystems & nanoengineering · 2025Article
- Article
- Subcutaneous and continuous blood pressure monitoring in an ambulatory sheep by piezoelectric micromachined ultrasonic transducers.Microsystems & nanoengineering · 2025Article
- On-chip particle levitation and micromanipulation using bulk acoustic waves.Lab on a chip · 2025Article
- Review of Linear-Array-Transducer-Based Volumetric Ultrasound Imaging Techniques and Their Biomedical Applications.Bioengineering (Basel, Switzerland) · 2025Review
- Coherent acoustic frequency comb via floquet engineering of optical tweezer phonon lasers.Science advances · 2025Article
- A Generative AI-Assisted Piezo-MEMS Ultrasound Device for Plant Dehydration Monitoring.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- A Full-Range Proximity-Tactile Sensor Based on Multimodal Perception Fusion for Minimally Invasive Surgical Robots.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Multiple Ring Electrode-Based PMUT with Tunable Deflections.Micromachines · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices' design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author's past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.