ArticleMicromachines2023
An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed, 6 citations in OpenAlex.
- Characterization of Sensitivity of Time Domain MEMS Accelerometer.Micromachines · 2024Article
- The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer.Sensors (Basel, Switzerland) · 2024Article
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Authors and funding
6 authors at 1 institution in 1 country.
Funding
Abstract
Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages-such as high sensitivity and immunity to electromagnetic noise-over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 10
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