ArticleMicromachines2023
Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed.
- Design, Manufacturing, Tribology, and Performance of Microgears and Microgear Trains: A Critical Review of Mechanical Power Transmission at the Microscale.Micromachines · 2026Review
- The Research on Multi-Process Collaborative Manufacturing and Characterization Methods of Micro-Nano-Composite Layered Structures.Nanomaterials (Basel, Switzerland) · 2025Article
- Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask.Micromachines · 2024Article
- A Hybrid Strategy for Profile Measurement of Micro Gear Teeth.Micromachines · 2023Article
- An Effect of Layered Auxiliary Cathode on Thickness Uniformity in Micro Electroforming Process.Micromachines · 2023Article
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Authors and funding
5 authors.
Funding
Abstract
The thickness nonuniformity of an electroformed layer is a bottleneck problem for electroformed micro metal devices. In this paper, a new fabrication method is proposed to improve the thickness uniformity of micro gear, which is the key element of various microdevices. The effect of the thickness of the photoresist on the uniformity was studied by simulation analysis, which showed that as the thickness of the photoresist increased, the thickness nonuniformity of the electroformed gear should decrease due to the reduced edge effect of the current density. Differently from the traditional method performed by one-step front lithography and electroforming, multi-step, self-aligned lithography and electroforming are used to fabricate micro gear structures in proposed method, which intermittently keeps the thickness of photoresist from decreasing during processes of alternate lithography and electroforming. The experimental results show that the thickness uniformity of micro gear fabricated by the proposed method was improved by 45.7% compared with that fabricated by the traditional method. Meanwhile, the roughness of the middle region of the gear structure was reduced by 17.4%.
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Registered trials
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