ReviewDalton transactions (Cambridge, England : 2003)2023
Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials.
Review in Dalton transactions (Cambridge, England : 2003), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
7 citing papers in PubMed.
- Tailoring Li-Al-O Interphases in Garnet-Type Solid-State Electrolytes via Powder Atomic Layer Deposition.ACS applied materials & interfaces · 2026Article
- Potassium Hexafluoroacetylacetonate Complex with 18-Crown-6 Ether as a Volatile Precursor of Molecular and Inorganic Films: Thermal and Structural Insights.International journal of molecular sciences · 2026Article
- High-performance ionomer-free gas diffusion cathodes with low Pt loading for proton exchange membrane water electrolysis.Communications materials · 2026Article
- Atomic Layer Deposition for Perovskite Solar Cells: Interface Engineering, Stability Enhancement, and Future Prospects.Nanomaterials (Basel, Switzerland) · 2025Review
- Plasma-Enhanced Spatial Atomic Layer Deposition on 2D and 3D Surface Topologies: The Case of Amorphous and Crystalline TiOThe journal of physical chemistry. C, Nanomaterials and interfaces · 2025Article
- Investigating Benzoic Acid Derivatives as Potential Atomic Layer Deposition Inhibitors Using Nanoscale Infrared Spectroscopy.Nanomaterials (Basel, Switzerland) · 2025Article
- Atomic Layer Deposition of Antibacterial Nanocoatings: A Review.Antibiotics (Basel, Switzerland) · 2023Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Atomic layer deposition (ALD) is a widely recognized technique for depositing ultrathin conformal films with excellent thickness control at Ångström or (sub)monolayer level. Atmospheric-pressure ALD is an upcoming ALD process with a potentially lower ownership cost of the reactor. In this review, we provide a comprehensive overview of the recent applications and development of ALD approaches emphasizing those based on operation at atmospheric pressure. Each application determines its own specific reactor design. Spatial ALD (s-ALD) has been recently introduced for the commercial production of large-area 2D displays, the surface passivation and encapsulation of solar cells and organic light-emitting diode (OLED) displays. Atmospheric temporal ALD (t-ALD) has opened up new emerging applications such as high-porosity particle coatings, functionalization of capillary columns for gas chromatography, and membrane modification in water treatment and gas purification. The challenges and opportunities for highly conformal coating on porous substrates by atmospheric ALD have been identified. We discuss in particular the pros and cons of both s-ALD and t-ALD in combination with their reactor designs in relation to the coating of 3D and high-porosity materials.
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.