ArticleMicromachines2023
Plasma Figure Correction Method Based on Multiple Distributed Material Removal Functions.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
1 citing paper in PubMed.
- Research on Processing Temperature of Atmospheric Pressure Microwave Plasma Based on Fused Silica Etching.Micromachines · 2026Article
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7 authors.
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Abstract
In the process of plasma figure correction for a quartz sub-mirror, the plasma parallel removal process and ink masking layer are combined for the first time. A universal plasma figure correction method based on multiple distributed material removal functions is demonstrated, and its technological characteristics are analyzed. Through this method, the processing time is independent of the workpiece aperture, which saves time for the material removal function to scan along the trajectory. After seven iterations, the form error of the quartz element is converged from the initial figure error of ~114 nm RMS to a figure error of ~28 nm RMS, which shows the practical potential of the plasma figure correction method based on multiple distributed material removal functions in optical element manufacturing and the possibility of becoming a new stage process in the optical manufacturing chain.
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