ArticleMicromachines2023
Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Machine Learning-Assisted Burst Femtosecond Laser Polishing of Invar Alloy: Process Optimization and Performance Enhancement.Nanomaterials (Basel, Switzerland) · 2026Article
- Long GHz-Burst Laser Surface Polishing of AlSl 316L Stainless Steel Parts Manufactured by Short GHz-Burst Laser Ablation.Nanomaterials (Basel, Switzerland) · 2025Article
- Intensity Modulation Effects on Ultrafast Laser Ablation Efficiency and Defect Formation in Fused Silica.Nanomaterials (Basel, Switzerland) · 2025Article
- In-Volume Glass Modification Using a Femtosecond Laser: Comparison Between Repetitive Single-Pulse, MHz Burst, and GHz Burst Regimes.Materials (Basel, Switzerland) · 2024Article
- Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst.Micromachines · 2024Article
- Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes.Micromachines · 2024Article
- Comparative Study of Percussion Drilling in Glasses with a Femtosecond Laser in Single Pulse, MHz-Burst, and GHz-Burst Regimes and Optimization of the Hole Aspect Ratio.Micromachines · 2023Article
- Bessel Beam Dielectrics Cutting with Femtosecond Laser in GHz-Burst Mode.Micromachines · 2023Article
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Authors and funding
9 authors.
Funding
Abstract
The femtosecond GHz-burst mode laser processing has attracted much attention in the last few years. Very recently, the first percussion drilling results obtained in glasses using this new regime were reported. In this study, we present our latest results on top-down drilling in glasses, focusing specifically on the influence of burst duration and shape on the hole drilling rate and the quality of the drilled holes, wherein holes of very high quality with a smooth and glossy inner surface can be obtained. We show that a decreasing energy repartition of the pulses within the burst can increase the drilling rate, but the holes saturate at lower depths and present lower quality than holes drilled with an increasing or flat energy distribution. Moreover, we give an insight into the phenomena that may occur during drilling as a function of the burst shape.
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Registered trials
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