Evidence map›Paper›PMID 37374449›Full record

ArticleMaterials (Basel, Switzerland)2023

AlGaN HEMT Structures Grown on Miscut Si(111) Wafers.

Alexei V Sakharov, Dmitri S Arteev, Evgenii E Zavarin, Andrey E Nikolaev, Wsevolod V Lundin, Nikita D Prasolov, Maria A Yagovkina, Andrey F Tsatsulnikov, Sergey D Fedotov, Evgenii M Sokolov and 1 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

11 authors.

Alexei V SakharovSubmicron Heterostructures for Microelectronics, Research and Engineering Center, RAS, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.
Dmitri S ArteevIoffe Institute, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.ORCID 0000-0003-4447-8789
Evgenii E ZavarinSubmicron Heterostructures for Microelectronics, Research and Engineering Center, RAS, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.
Andrey E NikolaevSubmicron Heterostructures for Microelectronics, Research and Engineering Center, RAS, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.ORCID 0000-0001-6522-4484
Wsevolod V LundinIoffe Institute, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.
Nikita D PrasolovIoffe Institute, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.ORCID 0000-0002-7519-9208
Maria A YagovkinaIoffe Institute, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.
Andrey F TsatsulnikovSubmicron Heterostructures for Microelectronics, Research and Engineering Center, RAS, 26 Politekhnicheskaya, 194021 Saint-Petersburg, Russia.
Sergey D FedotovEpiel Joint Stock Company, 6/2 Akademika Valieva, 124460 Zelenograd, Russia.
Evgenii M SokolovEpiel Joint Stock Company, 6/2 Akademika Valieva, 124460 Zelenograd, Russia.
Vladimir N StatsenkoEpiel Joint Stock Company, 6/2 Akademika Valieva, 124460 Zelenograd, Russia.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

A complex study was performed on a set of AlGaN/GaN high-electron-mobility transistor structures grown by metalorganic vapor phase epitaxy on miscut Si(111) wafers with a highly resistive epitaxial Si layer to investigate the influence of substrate miscut on their properties. The results showed that wafer misorientation had an influence on the strain evolution during the growth and surface morphology, and could have a strong impact on the mobility of 2D electron gas, with a weak optimum at 0.5° miscut angle. A numerical analysis revealed that the interface roughness was a main parameter responsible for the variation in electron mobility.

Indexed as

AlGaNcarrier mobilityHEMTmiscutMOVPESi

Identifiers

PMID37374449
PMCPMC10303388

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.