ArticleMicromachines2023
Temperature Performance Study of SAW Sensors Based on AlN and AlScN.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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Who cites it
4 citing papers in PubMed.
- Uncooled low-noise optomechanical sensors on thin-film lithium niobate.Light, science & applications · 2026Article
- Equivalent Circuit Extraction of SAW Resonator with Spurious Modes Interference over a -55 °C to 85 °C Temperature Range.Micromachines · 2026Article
- Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator.Microsystems & nanoengineering · 2024Article
- Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System.Micromachines · 2024Article
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using MEMS technology and tested using VNA, and the test results were consistent with the simulation results. Temperature experiments were carried out with temperature control equipment. With the change in temperature, the changes in S11 parameters, TCF coefficient, phase velocity, and quality factor Q were analyzed. The results show that the temperature performance of the AlN-SAW resonator and the AlScN-SAW resonator is very good, and both have good linearity. At the same time, the sensitivity of the AlScN-SAW resonator is greater by 9.5%, the linearity is greater by 15%, and the TCF coefficient is greater by 11.1%. The temperature performance is excellent, and it is more suitable as a temperature sensor.
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