ArticleMicrosystems & nanoengineering2023
A monolithically integrated microcantilever biosensor based on partially depleted SOI CMOS technology.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed, 23 citations in OpenAlex.
- High Removal Rates and Atomically Smooth Surfaces Are Achieved on Silicon Wafers Using the New SiONanomaterials (Basel, Switzerland) · 2026Article
- Mechano-Organ-on-Chip for Cancer Research.International journal of molecular sciences · 2026Review
- Ultrasensitive Diamond Cantilever-Based Optical Microphone.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Nanodevice Approaches for Detecting Micro- and Nanoplastics in Complex Matrices.Nanomaterials (Basel, Switzerland) · 2025Review
- Silicon-Based Biosensors: A Critical Review of Silicon's Role in Enhancing Biosensing Performance.Biosensors · 2025Review
- Grating Bio-Microelectromechanical Platform Architecture for Multiple Biomarker Detection.Biosensors · 2024Article
- Mass and Stiffness Deconvolution in Nanomechanical Resonators for Precise Mass Measurement and In Vivo Biosensing.ACS nano · 2024Article
- Millimeter-scale magnetic implants paired with a fully integrated wearable device for wireless biophysical and biochemical sensing.Science advances · 2024Article
Corrections and comments
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Authors and funding
5 authors at 1 institution in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This paper presents a monolithically integrated aptasensor composed of a piezoresistive microcantilever array and an on-chip signal processing circuit. Twelve microcantilevers, each of them embedded with a piezoresistor, form three sensors in a Wheatstone bridge configuration. The on-chip signal processing circuit consists of a multiplexer, a chopper instrumentation amplifier, a low-pass filter, a sigma-delta analog-to-digital converter, and a serial peripheral interface. Both the microcantilever array and the on-chip signal processing circuit were fabricated on the single-crystalline silicon device layer of a silicon-on-insulator (SOI) wafer with partially depleted (PD) CMOS technology followed by three micromachining processes. The integrated microcantilever sensor makes full use of the high gauge factor of single-crystalline silicon to achieve low parasitic, latch-up, and leakage current in the PD-SOI CMOS. A measured deflection sensitivity of 0.98 × 10
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.