ArticleMicrosystems & nanoengineering2023
Frequency unlocking-based MEMS bifurcation sensors.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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Who cites it
6 citing papers in PubMed, 22 citations in OpenAlex.
- Electrical feedthrough governs symmetry of phononic frequency combs in MEMS resonators.Microsystems & nanoengineering · 2026Article
- Internal Resonance Mismatch-Controlled Dissipative Bistability Collapse in Coupled Micromechanical Oscillators.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Precise detection of single particles and bio-sensing applications on quartz crystal microbalance using non-linear resonance behavior.Microsystems & nanoengineering · 2026Article
- Signal-to-noise ratio enhancement for MEMS resonant sensors with potential barrier adjustable stochastic resonance.Microsystems & nanoengineering · 2026Article
- Bifurcation-based wide-range vacuum pressure micro-sensor.Scientific reports · 2025Article
- Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking.Microsystems & nanoengineering · 2024Article
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Authors and funding
8 authors at 4 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking due to a 1:3 internal resonance between two electrostatically coupled micro-resonators. The proposed detection mechanism allows the sensor to operate in binary (digital) and analog modes, depending on whether the sensor merely detects a significant jump event in the peak frequency upon unlocking or measures the shift in the peak frequency after unlocking and uses it in conjunction with a calibration curve to estimate the corresponding change in stimulus. We validate the success of this sensor paradigm by experimentally demonstrating charge detection. High charge resolutions are achieved in binary mode, up to 0.137 fC, and in analog mode, up to 0.01 fC. The proposed binary sensor enables extraordinarily high detection resolutions due to the excellent frequency stability under internal resonance and the high signal-to-noise ratio of the shift in peak frequency. Our findings offer new opportunities for high-performance ultrasensitive sensors.
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