ArticleScientific reports2023
Improving Josephson junction reproducibility for superconducting quantum circuits: junction area fluctuation.
Article in Scientific reports, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
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Who cites it
9 citing papers in PubMed.
- Wafer-Scale Electrical Characterization of Al/AlNanomaterials (Basel, Switzerland) · 2026Article
- Impact of fabrication history induced disorder on Josephson junction reproducibility and qubit performance.Scientific reports · 2026Article
- Wafer-scale uniformity improvement of Dolan-bridge Josephson junction by shadow evaporation bias correction.Scientific reports · 2025Article
- Methods to achieve near-millisecond energy relaxation and dephasing times for a superconducting transmon qubit.Nature communications · 2025Article
- Subangstrom ion beam engineering of buried ultrathin oxides for scalable quantum computing.Science advances · 2025Article
- Aluminum Josephson junction microstructure and electrical properties modified by thermal annealing.Scientific reports · 2024Article
- Article
- Optimizing Josephson Junction Reproducibility in 30 kV E-Beam Lithography: An Analysis of Backscattered Electron Distribution.Nanomaterials (Basel, Switzerland) · 2024Article
- Wiring surface loss of a superconducting transmon qubit.Scientific reports · 2024Article
Corrections and comments
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Authors and funding
9 authors.
Funding
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Abstract
Josephson superconducting qubits and parametric amplifiers are prominent examples of superconducting quantum circuits that have shown rapid progress in recent years. As such devices become more complex, the requirements for reproducibility of their electrical properties across a chip are being tightened. Critical current of the Josephson junction Ic is the essential electrical parameter in a chip. So, its variation is to be minimized. According to the Ambegaokar-Baratoff formula, critical current is related to normal-state resistance, which can be measured at room temperature. In this study, we focused on the dominant source of non-uniformity for the Josephson junction critical current-junction area variation. We optimized Josephson junction fabrication process and demonstrated resistance variation of 9.8-4.4% and 4.8-2.3% across 22 × 22 mm
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Registered trials
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