Evidence map›Paper›PMID 37177054›Full record

ArticleNanomaterials (Basel, Switzerland)2023

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry-Perot Cavity.

Qilin Jiang, Yuchan Zhang, Yufeng Xu, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, Jianrong Qiu

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nanomaterials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Qilin JiangState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Yuchan ZhangState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Yufeng XuState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Shian ZhangState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Donghai FengState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Tianqing JiaState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Zhenrong SunState Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.
Jianrong QiuState Key Laboratory of Optical Instrumentation, Zhejiang University, Hangzhou 310027, China.

Funding

'Manufacturing beyond limits' of Shanghai NoneNational Natural Science Foundation of China 12074123
6 · The paper itself

Abstract

This study developed a novel frequency-doubled Fabry-Perot cavity method based on a femtosecond laser of 1030 nm, 190 fs, 1 mJ, and 1 kHz. The time interval (60-1000 ps) and attenuation ratio (0.5-0.9) between adjacent sub-pulses of the 515 nm pulse train were able to be easily adjusted, while the efficiency was up to 50% and remained unchanged. Extremely high-quality low-spatial-frequency LIPSS (LSFL) was efficiently fabricated on an indium tin oxide (ITO) film using a pulse train with a time interval of 150 ps and attenuation ratio of 0.9 focused with a cylindrical lens. Compared with the LSFL induced by the primary Gaussian pulse, the uniformity of the LSFL period was enhanced from 481 ± 41 nm to 435 ± 8 nm, the divergence of structural orientation angle was reduced from 15.6° to 3.7°, and the depth was enhanced from 74.21 ± 14.35 nm to 150.6 ± 8.63 nm. The average line edge roughness and line height roughness were only 7.34 nm and 2.06 nm, respectively. The depths and roughness values were close to or exceeded those of resist lines made by the interference lithography. Compared with the common Fabry-Perot cavity, the laser energy efficiency of the pulse trains and manufacturing efficiency were enhanced by factors of 19 and 25. A very colorful "lotus" pattern with a size of 30×28 mm

Indexed as

extremely high-quality LIPSSfemtosecond laserfrequency-doubled Fabry–Perot cavityITO filmpulse train

Identifiers

PMID37177054
PMCPMC10179915

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.