ArticleNanoscale advances2023
Optimizing metal/n-AlGaN contact by recessed AlGaN heterostructure with a polarization effect.
Yuxuan Chen, Ke Jiang, Xiaojuan Sun, Zi-Hui Zhang, Shanli Zhang, Jianwei Ben, Bingxiang Wang, Long Guo, Dabing Li
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In one paragraphArticle in Nanoscale advances, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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9 authors.
Yuxuan ChenState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Ke JiangState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Xiaojuan SunState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.ORCID https://orcid.org/0000-0001-6836-3893 Zi-Hui ZhangState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Shanli ZhangState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Jianwei BenState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Bingxiang WangState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Long GuoState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.
Dabing LiState Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun 130033 China jiangke@ciomp.ac.cn lidb@ciomp.ac.cn.ORCID https://orcid.org/0000-0002-8372-1473 Funding
No grant is acknowledged in the PubMed record.
6 · The paper itselfAbstract
With increasing Al mole fraction, n-contact has become an important issue limiting the development of Al-rich AlGaN-based devices. In this work, we have proposed an alternative strategy to optimize the metal/n-AlGaN contact by introducing a heterostructure with a polarization effect and by etching a recess structure through the heterostructure beneath the n-contact metal. Experimentally, we inserted an n-Al
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PMID37143800
PMCPMC10153480
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