Evidence map›Paper›PMID 37109838›Full record

ReviewMaterials (Basel, Switzerland)2023

Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases.

György Sáfrán, Péter Petrik, Noémi Szász, Dániel Olasz, Nguyen Quang Chinh, Miklós Serényi

Open access · goldAbstract readReview
In one paragraph

Review in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
0.8field-weighted citation impact, top 30% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 6 citations in OpenAlex.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors at 2 institutions in 1 country.

György SáfránInstitute for Technical Physics and Materials Science, Centre for Energy Research, Konkoly-Thege út 29-33, 1121 Budapest, Hungary.
Péter PetrikInstitute for Technical Physics and Materials Science, Centre for Energy Research, Konkoly-Thege út 29-33, 1121 Budapest, Hungary.
Noémi SzászInstitute for Technical Physics and Materials Science, Centre for Energy Research, Konkoly-Thege út 29-33, 1121 Budapest, Hungary.
Dániel OlaszInstitute for Technical Physics and Materials Science, Centre for Energy Research, Konkoly-Thege út 29-33, 1121 Budapest, Hungary.ORCID 0000-0003-4136-4612
Nguyen Quang ChinhDepartment of Materials Physics, Eötvös Loránd University, Pázmány Péter Sétány 1/A, 1117 Budapest, Hungary.ORCID 0000-0002-6610-7308
Miklós SerényiInstitute for Technical Physics and Materials Science, Centre for Energy Research, Konkoly-Thege út 29-33, 1121 Budapest, Hungary.
Institute for Technical Physics and Materials Science · HUEötvös Loránd University · HU

Funding

Hungarian Scientific Research Fund 143216
6 · The paper itself

Abstract

The novel, single-sample concept combinatorial method, the so-called micro-combinatory technique, has been shown to be suitable for the high-throughput and complex characterization of multicomponent thin films over an entire composition range. This review focuses on recent results regarding the characteristics of different binary and ternary films prepared by direct current (DC) and radiofrequency (RF) sputtering using the micro-combinatorial technique. In addition to the 3 mm diameter TEM grid used for microstructural analysis, by scaling up the substrate size to 10 × 25 mm, this novel approach has allowed for a comprehensive study of the properties of the materials as a function of their composition, which has been determined via transmission electron microscopy (TEM), scanning electron microscopy (SEM), Rutherford backscattering spectrometry (RBS), X-ray diffraction analysis (XRD), atomic force microscopy (AFM), spectroscopic ellipsometry, and nanoindentation studies. Thanks to the micro-combinatory technique, the characterization of multicomponent layers can be studied in greater detail and efficiency than before, which is beneficial for both research and practical applications. In addition to new scientific advances, we will briefly explore the potential for innovation with respect to this new high-throughput concept, including the creation of two- and three-component thin film databases.

Indexed as

entire range of compositionmechanical propertiesmicro-combinatorial approachmicrostructuralopticalthin two- and three-component films

Identifiers

PMID37109838
PMCPMC10146370
OpenAlexW4363651555

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.