ArticleMicrosystems & nanoengineering2023
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
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Who cites it
12 citing papers in PubMed.
- Intelligent monitoring system for pipeline status based on MEMS acoustic emission sensors.Microsystems & nanoengineering · 2026Article
- Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter.Micromachines · 2026Article
- High frame rate ultrasonic flowmeter based on PMUT array with bidirectional acoustic beams.Microsystems & nanoengineering · 2025Article
- A Deep-Learned Monolithic Nanoparticle Asymmetric Thermal Flow Sensor for Flow Vector Estimation.ACS nano · 2025Article
- Article
- Intelligent planetary gear fault diagnosis system based on MEMS acoustic emission sensor.Microsystems & nanoengineering · 2025Article
- Biomarker detection based on nanoparticle-induced ultrasonic Rayleigh scattering.Microsystems & nanoengineering · 2024Review
- Piezoelectric Ultrasonic Local Resonant Ultra-Precision Grinding for Hard-Brittle Materials.Micromachines · 2024Article
- Unlocking the potential of biogas systems for energy production and climate solutions in rural communities.Nature communications · 2024Article
- An AlScN Piezoelectric Micromechanical Ultrasonic Transducer-Based Power-Harvesting Device for Wireless Power Transmission.Micromachines · 2024Article
- A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs).Micromachines · 2024Article
- A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer.Micromachines · 2023Article
Corrections and comments
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow measurements. However, traditional TTUFs are usually based on a bulk piezoelectric transducer, which limits their application in small-diameter channels. In this paper, we developed a miniaturized TTUF based on scandium-doped aluminum nitride (ScAlN) piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed TTUF contains two PMUT-based transceivers and a π-type channel. The PMUTs contain 13 × 13 square cells with dimensions of 2.8 × 2.8 mm
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Registered trials
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