Evidence map›Paper›PMID 37064166›Full record

ArticleMicrosystems & nanoengineering2023

A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions.

Zachary H Levine, Bradley K Alpert, Amber L Dagel, Joseph W Fowler, Edward S Jimenez, Nathan Nakamura, Daniel S Swetz, Paul Szypryt, Kyle R Thompson, Joel N Ullom

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Zachary H LevineNational Institute of Standards and Technology, Gaithersburg, MD 20899 USA.ORCID 0000-0002-9928-276X
Bradley K AlpertNational Institute of Standards and Technology, Boulder, CO 80305 USA.ORCID 0000-0001-9765-9642
Amber L DagelSandia National Laboratories, Albuquerque, NM 87123 USA.ORCID 0000-0002-5882-1640
Joseph W FowlerNational Institute of Standards and Technology, Boulder, CO 80305 USA.
Edward S JimenezSandia National Laboratories, Albuquerque, NM 87123 USA.
Nathan NakamuraNational Institute of Standards and Technology, Boulder, CO 80305 USA.
Daniel S SwetzNational Institute of Standards and Technology, Boulder, CO 80305 USA.
Paul SzyprytNational Institute of Standards and Technology, Boulder, CO 80305 USA.
Kyle R ThompsonSandia National Laboratories, Albuquerque, NM 87123 USA.
Joel N UllomNational Institute of Standards and Technology, Boulder, CO 80305 USA.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on the circuit wafer itself. A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit. The reconstruction is consistent with the circuit's design file.

Indexed as

Electronic devicesPhysics

Identifiers

PMID37064166
PMCPMC10101988

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.