ArticleScientific reports2023
Deep multilevel wet etching of fused silica glass microstructures in BOE solution.
Article in Scientific reports, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
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Who cites it
7 citing papers in PubMed, 34 citations in OpenAlex.
- Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging.Micromachines · 2026Review
- High-Efficiency Fiber Edge Coupling for Silicon Nitride Integrated Photonics.Micromachines · 2025Article
- Advanced microfluidic techniques for the preparation of solid lipid nanoparticles: Innovations and biomedical applications.International journal of pharmaceutics: X · 2025Review
- Improved tribological performance of silica glassRSC advances · 2025Article
- A MEMS wall shear stress sensor with floating cover plate for aerospace flow monitoring in harsh environments.Microsystems & nanoengineering · 2025Article
- Selective Wet Etching for Scalable Nanofabrication of Patterned MXene Thin Films.Nano letters · 2025Article
- Antireflection microstructures on ZnSe for mid- and far-IR fabricated by femtosecond laser ablation assisted with wet chemical etching.Scientific reports · 2024Article
Corrections and comments
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Authors and funding
11 authors at 2 institutions in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its chemical resistance, optical, electrical, and mechanical performance. Wet etching is the key method for fabricating of such microdevices. Protective mask integrity is a big challenge due extremely aggressive properties of etching solution. Here, we propose multilevel microstructures fabrication route based on fused silica deep etching through a stepped mask. First, we provide an analysis of a fused silica dissolution mechanism in buffered oxide etching (BOE) solution and calculate the main fluoride fractions like [Formula: see text], [Formula: see text], [Formula: see text] as a function of pH and NH
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.