ArticleNanomaterials (Basel, Switzerland)2023
Plasma-Assisted Atomic Layer Deposition of IrO
Valerio Di Palma et al.PubMed ↗Full text ↗Publisher ↗
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3 papers cite it
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ArticleNanomaterials (Basel, Switzerland)2023
Valerio Di Palma et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.