ArticleMicromachines2023
Effect of Mask Geometry Variation on Plasma Etching Profiles.
Josip Bobinac et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
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ArticleMicromachines2023
Josip Bobinac et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.