Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System.

Xiang Cheng, Shun Xu, Yan Liu, Yingchao Cao, Huikai Xie, Jinhui Ye

Abstract read

In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it

0cells of the map it votes in

2citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

Scanning Micromirror Calibration Method Based on PSO-LSSVM Algorithm Prediction.Micromachines · 2024
Article
Beam Scanning and Capture of Micro Laser Communication Terminal Based on MEMS Micromirrors.Micromachines · 2023
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Xiang ChengSchool of Aerospace Engineering, Xiamen University, Xiamen 361005, China.

Shun XuSchool of Aerospace Engineering, Xiamen University, Xiamen 361005, China.

Yan LiuSchool of Ocean Information Engineering, Jimei University, Xiamen 361021, China.

Yingchao CaoSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Huikai XieSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0002-8393-0021

Jinhui YeSchool of Aerospace Engineering, Xiamen University, Xiamen 361005, China.

Funding

Foshan Science and Technology Innovation Project 2018IT100252National Key R&D Program of China 2021YFB3200201Youth Foundation of Fujian Natural Science 2021J05174

6 · The paper itself

Abstract

Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly important role in active structured light systems. However, the initial phase error of the structured light generated by a scanning micromirror seriously affects the accuracy of the corresponding system. This paper reports an optoelectronic integrated sensor with high irradiance responsivity and high linearity that can be used to correct the phase error of the micromirror. The optoelectronic integrated sensor consists of a large-area photodetector (PD) and a receiving circuit, including a post amplifier, an operational amplifier, a bandgap reference, and a reference current circuit. The optoelectronic sensor chip is fabricated in a 180 nm CMOS process. Experimental results show that with a 5 V power supply, the optoelectronic sensor has an irradiance responsivity of 100 mV/(μW/cm

Indexed as

high linearityMEMS mirroroptoelectronic integrated sensor high irradiance responsivityphase error

Identifiers

PMID36984968

DOI10.3390/mi14030561

PMCPMC10051696

What OpenQuestion holds

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LicenceCC BY

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.