Structural Design and Experimental Studies of Resonant Fiber Optic Scanner Driven by Co-Fired Multilayer Piezoelectric Ceramics.

Piezo-driven resonant fiber optic scanners are gaining more and more attention due to their simple structure, weak electromagnetic radiation, and non-friction loss. Conventional piezo-driven resonant fiber optic scanners typically use quadrature piezoelectric tubes (piezo tubes) operating in 31-mode with high drive voltage and low excitation efficiency. In order to solve the abovementioned problem, a resonant fiber scanner driven by co-fired multilayer piezoelectric ceramics (CMPCs) is proposed in which four CMPCs drive a cantilevered fiber optic in the first-order bending mode to achieve efficient and fast space-filling scanning. In this paper, the cantilever beam vibration model with base displacement excitation was derived to provide a theoretical basis for the design of the fiber optic scanner. The finite element method was used to guide the dynamic design of the scanner. Finally, the dynamics characteristics and scanning trajectory of the prepared scanner prototype were tested and compared with the theoretical and simulation calculation results. Experimental results showed that the scanner can achieve three types of space-filling scanning: spiral, Lissajous, and propeller. Compared with the structure using piezo tubes, the designed scanner achieved the same scanning range with smaller axial dimensions, lower drive voltage, and higher efficiency. The scanner can achieve a free end displacement of 10 mm in both horizontal and vertical directions under a sinusoidal excitation signal of 50 V