ArticleMicromachines2023
ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed.
- Dual-Electrodes PMUTs on Glasses for Wearable Human Blink Monitoring.Micromachines · 2026Article
- Article
- Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding.Micromachines · 2025Article
- ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection.Micromachines · 2024Article
- Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on ScMicromachines · 2023Article
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Authors and funding
9 authors.
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No grant is acknowledged in the PubMed record.
Abstract
Piezoelectric micromechanical ultrasonic transducers (pMUTs) are new types of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart homes. However, previously reported pMUTs are limited by a short sensing distance due to lower output sound pressure. In this work, a pMUT with a special dual-ring structure based on scandium-doped aluminum nitride (ScAlN) is proposed. The combination of a dual-ring structure with pinned boundary conditions and a high piezoelectric performance ScAlN film allows the pMUT to achieve a large dynamic displacement of 2.87 μm/V and a high electromechanical coupling coefficient (kt2) of 8.92%. The results of ranging experiments show that a single pMUT achieves a distance sensing of 6 m at a resonant frequency of 91 kHz, the farthest distance sensing registered to date. This pMUT provides surprisingly fertile ground for various distance sensing applications.
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