ArticleMicrosystems & nanoengineering2023
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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4 citing papers in PubMed.
- A self-powered microsystem with efficient power management for continuous wireless sensing.Microsystems & nanoengineering · 2026Article
- A Fixed-End Beam-Cantilever Piezoelectric MEMS Speaker with Flexible Supporting Layer.Micromachines · 2026Article
- Piezoelectric MEMS vibration energy harvester using BiFeOScientific reports · 2026Article
- Freeze-Cast Porous Textured BaTiOACS applied energy materials · 2025Article
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Authors and funding
8 authors.
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Abstract
Scavenged energy from ambient vibrations has become a promising energy supply for autonomous microsystems. However, restricted by device size, most MEMS vibration energy harvesters have much higher resonant frequencies than environmental vibrations, which reduces scavenged power and limits practical applicability. Herein, we propose a MEMS multimodal vibration energy harvester with specifically cascaded flexible PDMS and "zigzag" silicon beams to simultaneously lower the resonant frequency to the ultralow-frequency level and broaden the bandwidth. A two-stage architecture is designed, in which the primary subsystem consists of suspended PDMS beams characterized by a low Young's modulus, and the secondary system consists of zigzag silicon beams. We also propose a PDMS lift-off process to fabricate the suspended flexible beams and the compatible microfabrication method shows high yield and good repeatability. The fabricated MEMS energy harvester can operate at ultralow resonant frequencies of 3 and 23 Hz, with an NPD index of 1.73 μW/cm
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