ReviewMicrosystems & nanoengineering2023
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications.
Review in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 20 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
20 citing papers in PubMed.
- Blood-Brain Barrier Regulation: Evolving From Classic Strategies to Electrochemical Ion and Reactive Oxygen Species Control.Advanced healthcare materials · 2026Review
- Determining Preparation-Induced Differences in Local Forces Acting along Polymer Chains in Spin-Coated Films.ACS macro letters · 2026Article
- Deployable 3D architectures from wafer-fabricated precursors.Nature communications · 2026Article
- Mechanical Robustness and Conductivity Retention in TiACS omega · 2026Article
- Carbon based functional materials enable multifunctional flexible strain sensors for wearable and implantable applications.Discover nano · 2026Review
- Exploiting Device Deformability for Fluid and Particle Manipulation.Small (Weinheim an der Bergstrasse, Germany) · 2026Review
- Tailored Nitrogen-Doped Laser-Induced Graphene on Novel Synthesized Cross-Linked Aromatic Polyimides for Targeted Applications.Polymers · 2026Article
- Advances, challenges and prospects of origami and kirigami optoelectronics.Nature communications · 2026Review
- Efficient Large-Area Graphene p-n Junction Terahertz Receivers on an Integrated Optical Platform.Small methods · 2025Article
- Flexible Memory Application of Nanoscale Ti-Ge-Te Thin Film as Information Storage Medium With Excellent Thermal Stability, Low Resistance Drift and Superior Bending Characteristic.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Microfluidic technologies for wearable and implantable biomedical devices.Lab on a chip · 2025Review
- Soluble Photosensitive Polyimide Precursor with Bisphenol A Framework: Synthesis and Characterization.Polymers · 2025Article
- Optimization of Insulation Structure Design for Enameled Wires Based on Molecular Structure Design.Polymers · 2025Article
- Challenges and opportunities in engineering next-generation 3D microelectronic devices: improved performance and higher integration density.Nanoscale advances · 2024Review
- Dynamics of Blister Actuation in Laser-Induced Forward Transfer for Contactless Microchip Transfer.Nanomaterials (Basel, Switzerland) · 2024Article
- Impact of molecular configuration on the photoluminescence and electrical characteristics of poly-pyrrol-thiazol-imine polymers films.Scientific reports · 2024Article
- Soluble Fluorinated Cardo Copolyimide as an Effective Additive to Photopolymerizable Compositions Based on Di(meth)acrylates: Application for Highly Thermostable Primary Protective Coating of Silica Optical Fiber.International journal of molecular sciences · 2024Article
- Microsecond-Scale Transient Thermal Sensing Enabled by Flexible MoResearch (Washington, D.C.) · 2024Article
- Atomic insights into thickness-dependent deformation mechanism and mechanical properties of Ag/PMMA ultra-thin nanofilms.Nanoscale advances · 2023Article
- Structural Designs of Transparent Polyimide Films with Low Dielectric Properties and Low Water Absorption: A Review.Nanomaterials (Basel, Switzerland) · 2023Review
Corrections and comments
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.