ArticleJournal of the Electrochemical Society2021
Bottom-Up Gold Filling in New Geometries and Yet Higher Aspect Ratio Gratings for Hard X-Ray Interferometry.
Article in Journal of the Electrochemical Society, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
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Who cites it
9 citing papers in PubMed.
- Microfluidic Gratings for X-Ray Phase Contrast Imaging.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Quantifying grating defects in X-ray Talbot-Lau interferometry through a comparative study of two fabrication techniques.Scientific reports · 2025Article
- Emission Ghost Imaging: reconstruction with data augmentation.Physical review. A · 2024Article
- Implementation of a dual-phase grating interferometer for multi-scale characterization of building materials by tunable dark-field imaging.Scientific reports · 2024Article
- Towards virtual histology with X-ray grating interferometry.Scientific reports · 2023Article
- Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating.Applied optics · 2022Article
- Robust Bottom-Up Gold Filling of Deep Trenches and Gratings.Journal of the Electrochemical Society · 2022Article
- Survey of P-Block Metal Additives for Superconformal Cu Deposition in an Alkaline Electrolyte.Journal of the Electrochemical Society · 2022Article
- Mechanism of Bismuth Stimulated Bottom-up Gold Feature Filling.Journal of the Electrochemical Society · 2022Article
Corrections and comments
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Authors and funding
8 authors.
Funding
Abstract
An extreme bottom-up filling variant of superconformal Au electrodeposition yielding void-free filling of recessed features is demonstrated with diffraction gratings composed of a two-dimensional patterned "chessboard" array of square vias of aspect ratio (depth/width) ≈ 23 as well as one-dimensional arrays of trenches having aspect ratios exceeding 50 and 65. Deposition on planar and patterned substrates is examined in several near-neutral x mol·L
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