ArticleJournal of the Electrochemical Society2022
Robust Bottom-Up Gold Filling of Deep Trenches and Gratings.
Article in Journal of the Electrochemical Society, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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The trial behind it
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Who cites it
6 citing papers in PubMed.
- Quantifying grating defects in X-ray Talbot-Lau interferometry through a comparative study of two fabrication techniques.Scientific reports · 2025Article
- A four-grating interferometer for x-ray multi-contrast imaging.Medical physics · 2024Article
- Emission Ghost Imaging: reconstruction with data augmentation.Physical review. A · 2024Article
- Implementation of a dual-phase grating interferometer for multi-scale characterization of building materials by tunable dark-field imaging.Scientific reports · 2024Article
- Survey of P-Block Metal Additives for Superconformal Cu Deposition in an Alkaline Electrolyte.Journal of the Electrochemical Society · 2022Article
- Mechanism of Bismuth Stimulated Bottom-up Gold Feature Filling.Journal of the Electrochemical Society · 2022Article
Corrections and comments
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Authors and funding
4 authors.
Funding
Abstract
This work extends an extreme variant of superconformal Au electrodeposition to deeper device architectures while exploring factors that constrain its function and the robustness of void-free processing. The unconventional bottom-up process is used to fill diffraction gratings with trenches 94 μm deep and 305 μm deep, with aspect ratios (height/width) of just below 20 and 15, respectively, in near-neutral 0.16 mol·L
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.