ArticleNanomaterials (Basel, Switzerland)2023
Fast and Efficient Simulation of the FEBID Process with Thermal Effects.
Article in Nanomaterials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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Who cites it
4 citing papers in PubMed.
- Ligand Co-Deposition in Focused Electron Beam Induced Nanoprinting: A Predictive Composition Model.Small methods · 2026Article
- Dual-Functional 3D-Nanoprinted AFM Probes for Correlative Magnetic and Conductive Characterization.Small methods · 2026Article
- Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition.Beilstein journal of nanotechnology · 2025Article
- Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition.Nanomaterials (Basel, Switzerland) · 2023Article
Corrections and comments
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Authors and funding
2 authors.
Funding
Abstract
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D growth process complicate the shape-true transfer from a target 3D model to the actual deposit. Here, we describe an efficient and fast numerical approach to simulate the growth process, which allows for a systematic study of the influence of the most important growth parameters on the resulting shape of the 3D structures. The precursor parameter set derived in this work for the precursor Me
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